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Xi'an Zhiyue Material Tech. Co., Ltd.
Xi'an Zhiyue Material Tech. Co., Ltd.

Titanium Oxide Target (TiO2)

Titanium Dioxide (chemical formula: TiO 2), white solid or amphoteric oxide powder, molecular weight: 79.9, is a white pigment with non-toxicity, optimal whiteness and brightness, opacity, and is considered to be one of the best white pigments in the world in terms of performance today. Titanium Dioxide adheres well, is not susceptible to chemical changes and will always be white. Titanium dioxide is generally classified as anatase (A) and rutile (R).


Purity: 99.99%   

CAS: 13463-67-7

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Application of Titanium Oxide (TiO2)

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TiO2 target material is used for thin film deposition, usually used in fuel cells, decoration, semiconductors, displays, LED and photovoltaic devices, glass coatings, etc.

Product Overview

  • Product Name: Titanium Dioxide Sputtering Target

  • Chemical Formula: TiO₂

  • CAS Number: 3463-67-7

  • Purity Options: 99.5%, 99.9%, 99.99% (3N, 4N)

  • Form: Planar disc, rectangular, or custom-machined targets

  • Standard Sizes: 1–6 inch diameters, custom dimensions available

  • Bonding: Optional Indium bonding to Cu, Mo, or stainless steel backing plates

  • Crystal Phases: Rutile or anatase available upon request

  • Packaging: Cleanroom-ready, vacuum-sealed under inert gas



Key Advantages of Zhiyue's TiO₂ Sputtering Targets

FeatureTechnical Value

High Density & Purity

Enhances film uniformity, reduces particle generation, and supports high-reliability coatings.

Phase-Control Options (Rutile/Anatase)

Tailored for specific optical, electronic, or photocatalytic properties.

Excellent Surface Finish

Ra < 0.4 µm for smooth plasma distribution and improved adhesion.

Custom Geometry & Bonding Services

Ensures compatibility with OEM sputtering systems and thermal stability during deposition.



Industrial Applications of TiO₂ Targets

TiO₂ sputtering targets are widely used in high-performance thin film applications due to their exceptional optical, dielectric, and photocatalytic properties:

  • Optical Coatings (AR/IR/UV)
    TiO₂ is a preferred material for anti-reflective (AR) and high-index coatings in laser optics, precision lenses, and architectural glass.

  • Photocatalytic Films
    Anatase-phase TiO₂ is used in environmental purification, self-cleaning glass, and antibacterial surfaces activated by UV light.

  • Semiconductor & Dielectric Layers
    Applied in MOS capacitors, DRAM, and dielectric stacks where high permittivity and thermal stability are required.

  • Solar Energy & Photovoltaics
    TiO₂ layers function as electron transport layers (ETL) or passivation films in perovskite, dye-sensitized, and silicon solar cells.

  • Display & Smart Glass Technologies
    Used in electrochromic layers and refractive index tuning for advanced optical displays and adaptive windows.



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