Xi'an Zhiyue Material Tech. Co., Ltd.
Xi'an Zhiyue Material Tech. Co., Ltd.

High Purity Samarium Sputtering Target (Sm)

Samarium (Sm) sputtering target is a silver-colored target composed of high-purity samarium metal. It has a melting point of 1072°C, a boiling point of 1791°C and a density of 7.353 g/cm3. It is relatively stable in dry air, but oxidizes on contact with moisture. The metal has limited applications, but is used in the glass, ceramics and electronics industries, as well as in the manufacture of permanent magnets.



Purity: 99.95%  

CAS: 7440-19-9

  • samarium sputtering target
  • samarium sputtering target

Application of High Purity Samarium Sputtering Target (Sm)

1

Sm sputtering targets can be used for thin film deposition, decoration, semiconductors, displays, LED and photovoltaic devices, functional coatings, and other optical information storage space industries, glass coating industries such as automotive and architectural glass, and optical communication.

2

It can also be used as a catalyst for ethanol dehydrogenation and dehydration; 153Sm is used for the treatment of cancer due to its radioactivity; Used as an absorbent for nuclear reactors; Oxidized mar is used to manufacture infrared absorbing glass specialized for carbon arc lamp electrodes; Calcium fluoride crystals used in doped optical lasers.

Key Advantages of High Purity Samarium (Sm) Sputtering Targets


1) High-purity rare-earth metal for cleaner thin-film deposition (99.95%) 

A high-purity samarium sputtering target helps reduce impurity-driven defects in deposited films, supporting improved consistency for semiconductor R&D, optical coatings, and precision functional layers where contamination control matters.


2) Enables Sm-based functional films and Sm-doped layers

Samarium is used in advanced materials research for rare-earth functional coatings, including Sm-containing and Sm-doped thin films. Sputtering from a metallic Sm target provides a controllable route to tailor film composition for electronic, optical, and specialty coating applications.


3) Suitable for reactive sputtering to form samarium compounds

Because samarium is chemically active, it can be used in reactive environments (depending on your tool and process) to form samarium oxide (Sm₂O₃) or other Sm-containing compound films, which are relevant in optical and functional material systems.


4) Customizable target formats for different deposition tools

Sm sputtering targets can be supplied in custom sizes and thicknesses to match common magnetron sputtering cathodes for both laboratory-scale work and production coating lines, enabling easier scale-up and tool compatibility.


5) Vacuum-sealed packaging and handling support for an oxidation-sensitive metal

Samarium can oxidize when exposed to moisture. Professionally packaged Sm targets (typically sealed and handled with contamination control) help customers maintain a clean sputtering surface and improve run-to-run stability.


Products

High Purity Samarium Sputtering Target (Sm) FAQs

  • Q

    How do I choose the right samarium (Sm) sputtering target specification for my deposition process?

    A

    To select an Sm target efficiently, confirm the following with your process engineer: purity level, target size/shape and thickness, whether you need a bonded target/backing plate for heat dissipation, and your sputtering setup (DC/RF power, base pressure, and whether you will use reactive gases). If your film requires tight composition control, also define allowed impurity limits (commonly O/C/N and metallic traces) and request a matching COA + lot traceability. This information helps ensure stable sputtering, repeatable film properties, and tool compatibility.

  • Q

    Is samarium suitable for reactive sputtering (e.g., forming Sm oxide films)?

    A

    In many sputtering systems, metallic samarium can be used in reactive sputtering with controlled gases to form Sm-containing compound films (commonly oxides). The optimal recipe depends on your power mode, gas flow control, base pressure, and desired film stoichiometry.

  • Q

    How should samarium sputtering targets be stored and handled?

    A

    Samarium is sensitive to moisture and can form surface oxides. Store targets sealed, dry, and clean (preferably vacuum-sealed). Handle with gloves, minimize air exposure time, and reseal immediately after inspection or installation to reduce oxidation and contamination.

  • Q

    Can you supply custom sizes, thicknesses, and bonded assemblies for Sm targets?

    A

    Yes. Sm targets are often available as custom-made discs or plates, and bonded configurations may be possible depending on your required size and cooling needs. For quoting, provide dimensions/tolerances, whether bonding is required, and your sputter gun/cathode type.

  • Q

    What documentation can be provided with a samarium sputtering target?

    A

    Typical deliverables include Certificate of Analysis (COA), CAS reference, and batch/lot traceability. If your application requires specific impurity limits (e.g., oxygen or metallic contaminants) or additional testing, request those requirements before ordering.

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